Ultra Fast Diaphragm Valve 'UF Series'
Ultra-high purity diaphragm valve. Capable of approximately 100 million open/close cycles under atomic layer deposition (ALD) and high-speed switching (less than 5ms) applications (under our testing conditions).
The Ultra Fast Series is designed for high-purity processes that require high-speed opening and closing at high temperatures, operating continuously under precisely the same conditions, as exemplified by atomic layer deposition (ALD processes). It employs a unique flow control mechanism (patent pending US61/910,079) that allows for fine adjustments to maintain accurate flow rates during use. <Features> - High-speed valve opening and closing (valve response time: less than 5 ms) - Ultra-long lifespan (passed 100 million opening and closing tests) - Pressure resistance: Vacuum to 1 MPa (150 psi) - Body material: SS316L VAR or VIM/VAR (compliant with SEMI F20-0305) - Operating temperature range: -10 to 120°C (standard bonnet) -10 to 200°C (extended bonnet) - Sizes: 1/4", 1/2" - Surface finish (average): 5 microinches - Valve types: 2-port, 3-port, 4-port - Optional thermocouple and heater cartridge hole processing available - Optional solenoid valve and limit switch compatibility *For more details, please download the PDF or feel free to contact us.
- Company：ハムレット・モトヤマ・ジャパン
- Price：Other
